[mems-talk] Su 8 thickness

[eowin rohan]

The best thing would be put the first layer, pre-bake and then  to pour the thick layer of SU-8, I mean, just evaporate the solvent.

--- Den tors 2008-08-07 skrev jiang Liudi <ldjiang at hotmail.com>:
Från: jiang Liudi <ldjiang at hotmail.com>
Ämne: Re: [mems-talk] Su 8 thickness
Till: "General MEMS discussion" <mems-talk at memsnet.org>
Datum: torsdag 7 augusti 2008 09.22

Hi,
 
Thanks. I put SU8 down directly on pyrex wafer. could I ask when you spin thin
layer first, do you bake it before spin the second layer?