[mems-talk] problem with Photopatternable PDMS

[eowin rohan]

Hi Yusuf,

I'm afraid I have no suggestions to your problem, but I am very interested in photoparternable PDMS from Dow Cornig. Do you have good experience with your old 5351? I would like use it instead of SU-8. What about its transparency and colour, it is really colourless??. Does it swell with developer??

Thank you in advance and good luck with your new pdms.

Eowin

--- Den tors 2008-08-07 skrev Mohd.Yusuf <ysminstru at gmail.com>:
Från: Mohd.Yusuf <ysminstru at gmail.com>
Ämne: [mems-talk] problem with Photopatternable PDMS
Till: "General MEMS discussion" <mems-talk at memsnet.org>
Datum: torsdag 7 augusti 2008 18.22

Hello,

            I am facing some problem with Photopatternable PDMS WL 5351
(from dowcorning corp.) . I am working with 5351 since last 3 months, since
old pdms was out dated we ordered new pdms. With new PDMS i tried to get
same structures using same old recepie but is is giving bad structures with
bubbles or ruptured bubbles on developed structures.
I also tried to degass the PDMS in vacuum before spinning on wafer.

I have 2inch silicon wafer and pdms thickness of ~6microns. Structures are
~25 x 75 micron rectangles.

Any suggestions to solve this problem.

-- 
Yusuf
Germany.