[mems-talk] Metal etching

[Robert Rehammar]

Hi Peter,

Two very nice review articles about different etch-rates are by
Williams, K. R. J. of Micromechanincal processing 1996 vol 5 pp 256-269
and Part II by the same person 2003 same journal vol 12 pp 761.

I know there are recipes to etch some or all of these metals. Not sure
about selectivity towards ITO, but maybe somewhere to start.

Regrds,
Robert

ons 2008-08-06 klockan 08:06 +0200 skrev P.E.M. Kuijpers:
> Dear all,
> 
> Can one of these metals  Cr, Ti, Cu or Mo selectively be etched compared to
> ITO and what kind of etchant can be used for this
> 
> Thanks
> Peter