[mems-talk] Su 8 thickness
jiang Liudi
ldjiang at hotmail.com
Tue Aug 12 12:50:11 EDT 2008
hi,
Thanks again for the information.
sorry one more question,
If I coat two layers of 50um thick SU8, how long should I bake the 2nd layer which has total 100um thickness? should it be soft baked as a 50um one or 100um one?
Also, I am thinking of coating 4 layers of 50um thick SU8 to make up to 200um. would you also have some experience on such multilayers? How would be the soft bake time like for the 2nd, 3rd and 4th layer?
much appreciated again.
Best wishes,
Jiang
More information about the MEMS-talk
mailing list