[mems-talk] SiN waferbonding

[goorsky]

Hi Peter:

We use SiN-SiN bonding for III-V integration.  A couple of our 
references are listed below (with references in those papers to earlier 
work).

Hayashi S, Sandhu R, Wojtowicz M, Chen G, Hicks R, Goorsky MS. InGaAs 
quantum wells on wafer-bonded InP/GaAs substrates.  Journal of Applied 
Physics, vol.98, no.9, 1 Nov. 2005, pp. 93526-1-4.

Hayashi S, Sandhu R, Wojtowicz M, Sun Y, Hicks R, Goorsky MS. 
Determination of wafer bonding mechanisms for plasma activated SiN films 
with x-ray reflectivity. [Journal Paper] Journal of Physics D (Applied 
Physics), vol.38, no.10A, 21 May 2005, pp. A174-8.

P.E.M. Kuijpers wrote:
> Hi all,
>
> Does someone knows articles/recipes for SiN-SiN or SiN-Si waferbonding?
>
> Thanks in advance.
>
> Peter Kuijpers
> MiPlaza
> mailto:p.e.m.kuijpers at philips.com

-- 
Mark Goorsky
Professor and Chair
Materials Science and Engineering
University of California, Los Angeles
http://www.seas.ucla.edu/ms/faculty1/goorsky.html