[mems-talk] Wet etching thickness technique with smooth surface

Moshe moduli0621 at yahoo.com
Sat Aug 16 18:56:36 EDT 2008


Hello
When I operate wet etch to thick silicon wafer I get like scratches on the surface.
I am locking for technique to get smooth surface on silicon wafer when I operate wet etch. 
The wafer is without any mask.
Thank You    


      


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