[mems-talk] Wet etching thickness technique with smooth surface

[Andrea Mazzolari]

Which is wafer orientation ?
Andrea

> Hello
> When I operate wet etch to thick silicon wafer I get like scratches on the
> surface.
> I am locking for technique to get smooth surface on silicon wafer when I
> operate wet etch.
> The wafer is without any mask.
> Thank You