[mems-talk] Commercial Vendors of Silicone membranes

[seyeda at ualberta.ca]

Hi,
Wonderful, I am trying to spin around 10 micrometer of Sylgard 184 on 1  
to 2 inch glass wafers. Could you please tell me the spin parameters required to  
do such a thin layer of PDMS.

I appreciate you comments.
Thank you

Seyed


Quoting "Le Cao Hoai Nam" <lechnam at gmail.com>:

> Ditto to Brian. I always use spin-coated PDMS membranes to seal the Si
> mold for my molding. You can spin coat PDMS either onto Si or Glass.
> But I found it is easier to release with Glass substrates. Typically,
> I spin coat at 600 rpm in 40-50s to achieve PDMS thickness of 150-160
> um. A curing on a hotplate at 100C in 15 min would be enough to harden
> the PDMS membrane. I can even release thinner PDMS membrane without a
> problem.
>
> Greetings,
> Nam Le, Ritsumeikan University