[mems-talk] Commercial Vendors of Silicone membranes

[Le Cao Hoai Nam]

Hi Seyed,

I am sorry. I haven't tried such thin PDMS membranes. However, you may
try to increase the spin speed and time to see if you can achieve
that. Note that you should pour PDMS equally everywhere on the
substrate to enhance the membrane thickness's uniformity.

Greetings,
Nam Le
Ritsumeikan University, Japan

On Sat, Aug 23, 2008 at 1:12 AM,  <seyeda at ualberta.ca> wrote:
> Hi,
> Wonderful, I am trying to spin aroud 10 micrometer of Sylgard 184 on 1 to 2
> inch
> glass wafers. Could you please tell me the spin parameters required to do
> such a thin layer of PDMS.
> I appreciate yoy comments.
> Thank you
>
> Seyed