[mems-talk] Commercial Vendors of Silicone membranes

[Barbara Cortese]

it would depend on your spinner, ambient conditions and when you'll start spinning your PDMS(if it starts to polymerize then you'll get thicker layers)  but 6000rpm for 60 sec could achieve a thin layer, otherwise try to increase the speed!


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>From      : mems-talk-bounces at memsnet.org
To          : "General MEMS discussion" mems-talk at memsnet.org,"Le Cao Hoai Nam" lechnam at gmail.com
Cc          : 
Date      : Fri, 22 Aug 2008 10:12:22 -0600
Subject : Re: [mems-talk] Commercial Vendors of Silicone membranes

> Hi,
> Wonderful, I am trying to spin around 10 micrometer of Sylgard 184 on 1  
> to 2 inch glass wafers. Could you please tell me the spin parameters required to  
> do such a thin layer of PDMS.
> 
> I appreciate you comments.
> Thank you
> 
> Seyed