[mems-talk] reflow recipe for SPR 700-1.2, SPR 220-3.0, SPR 955CM-0.9, or S1813 photoresists?

[Mehmet Yilmaz]

Hello all,

I am going to try to reflow a photoresist for my application.

My photoresist options are SPR 700-1.2, SPR 220-3.0, SPR 955CM-0.9, or 
S1813.

Is there anybody who knows what is, or might be, the right recipe for a 
reflow with one of these photoresists?

And, how can I get rid of the reflown photoresist once I am done with my 
application?

Can 1165, Nanostrip, Piranha, or Acetone help me to strip the photoresist 
once I am done with my application?


Best regards,

Mehmet