[mems-talk] Adherence

Sat Aug 30 02:32:42 EDT 2008

Ni will not adhere to SiO2 or Si3N4 very well. Under the Ni, use an adhesion 
layer of 50-200 A of Cr, Ti, TiW, etc.

    --Kirt Williams

----- Original Message ----- 
From: "battas aziz" <battas at emt.inrs.ca>
To: "General MEMS discussion" <mems-talk at memsnet.org>
Sent: Friday, August 29, 2008 11:42 AM
Subject: [mems-talk] Adherence

> Please i need to knew if Nickel adhere to the oxyde (SiO2)and 
> nitride(Si3N4)
> Thanks Aziz