[mems-talk] Chromium reaction in DRIE (Bosch)?

Nodes Norbert N.Nodes at EVGroup.com
Wed Feb 6 10:24:19 EST 2008


Hello Mr. Holmström.

Even after removal with a suitable solvent, a very thin Cytop polymer layer can remain on top of chrome and inhibit etching.
You may have to treat the surface with some plasma or ashing process before chrome etching.

Best regards,
Norbert Nodes

n.nodes at evgroup.com


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