[mems-talk] Wafer silicon smoothing surface

[Andrea Mazzolari]

Try to look at "Improved anisotropic deep etching in KOH-solutions to
fabricate higly specular surfaces", Microelectronic Engineering 57–58
(2001) 781–786

Best regards,
Andrea

>
> Hi all
> The wafer orientation is 100.
>
> Thank you