[mems-talk] Cantilever sowing

[Shao Guocheng]

hi, there:
     if you are working on silicon wafers. one thing you can do is that you can expose and etch some lines around your dies during the process of making the cantilever. This way, when you get you cantilever done, 
  you will have thin lines around ur dies. it will much easier to get the wafer into single dies.  Good luck.
   
  Guocheng

"Ir. Elina Iervolino" <e.iervolino at tudelft.nl> wrote:
  Hello!

I have wafers with cantilever that need to be sowing to obtain the 
single die. 
I tried with one but all the cantilever do not survive because of the water flushing
on the wafer
Do anyone have experience with the sowing of the wafer with cantilever?