[mems-talk] Wafer silicon smoothing surface

Michael Arens moduli0621 at yahoo.com
Tue Feb 12 10:28:39 EST 2008


Hi
The article you send gave me another tool to achieve a
smooth surface.
Do you know about isotropic process that achieve
smooth surface ?
I want to get a smooth surface and a rounded angle
where there are sharp angles after the KOH etching .
  
best regards 



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