[mems-talk] Negative photoresist?

[jpt sharma]

Hello All

I have been trying to make an electrical contact in some molecular conductors using conventional lithography. The conductors is about 5 micron thick and 5 micro wide. While doing the liftoff processes the metal is not enough (20nm TI+ 100nm AU)  to hold the sample while doing liftoff. I tried with more metal, I couldn't liftoff at all. I have been using AZ5412 image reversal PR to make undercut profile. I am wondering if any one of you have some experience with making electrical contacts in relatively thick sample.
 
Look forward to hear from you.


Regards
J . Sharma