[mems-talk] electrical fabrication in molecular conductors

jpt sharma jptsharma at yahoo.com
Wed Feb 20 15:32:04 EST 2008


Hello All

I have been trying to make an electrical contact in some 
molecular conductors using conventional lithography. 
The conductors are about 5 micron thick and 5 micron wide. 

While doing the liftoff processes the metal is not enough 
(20nm TI+ 100nm AU)  to hold the sample while doing liftoff.
 
I tried with more metal, I couldn't liftoff at all. I have 
been using AZ5412 image reversal PR to make undercut profile. 

I am wondering if any one of you have some experience 
with making electrical contacts in relatively thick samples.
 
Look forward to hear from you.

Regards
J .. Sharma


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