[mems-talk] Looking for Spin on Dielectric

[Adam Nelson]

Hi all,

I'm new to microfabrication, so forgive my ignorance.

We are building an electrostatically actuated microvalve.  We have a
conductive foil sandwiched between two insulated, conductive substrates.  An
applied voltage attracts the foil which then covers up a hole and blocks air
flow.  The two substrates are made out of: the bottom layer is Cu
cladded circuit board and the top is Indium-Tin Oxide Coated (ITO) coated
glass.  ITO is a transparent electrode which we are using so that we can see
the foil actuating.

We are researching different spin-on dielectrics.  The dielectric doesn't
need to be photosensitive and we don't need to etch or do any other
processing.  It's just a permanent spin on dielectric.  We need a layer 2
microns or less and it needs to have a breakdown voltage greater than 500V
per micron.

So far the best product for us seems to be Cyclotene 3022-35, but I heard
it's expensive and I know there are a bunch of others.  Could anyone suggest
a few?

Thanks,
Adam