[mems-talk] Anneal recipe for Pt thin film on Si wafer

Miyakawa, Natsuki Natsuki.Miyakawa at eads.net
Thu Feb 28 11:34:39 EST 2008


Dear all,

does anyone of you know a good anneal recipe for Pt thin film e-beam
evaporated (~300nm) or sputtered (~1µm) on Si wafer (with ~100nm thermal
oxide) in order to enhence the adhesion and to stabilize the electric
resistance? I don't use adhesion layer like Ti.
Thanks!

Natsuki 



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