[mems-talk] Need recommendation on good book on bonding.

[Brubaker Chad]

Ed,

A couple of recommendations are:

SEMICONDUCTOR WAFER BONDING by Q-Y Tong and U. Gösele

And

WAFER BONDING: APPLICATIONS AND TECHNOLOGY edited by M. Alexe and U. Gösele

Both provide information on a large variety of bonding processes.  Overall, the first reference may be a bit better, as it is unified in a text-book format, whereas the second is more a collection of extended articles.

Best Regards,
Chad Brubaker

EV Group       invent * innovate * implement
Senior Process Engineer - Technology - Tel:  480.727.9635, Fax:  480.727.9700  e-mail: c.brubaker at EVGroup.com, www.EVGroup.com


-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org] On Behalf Of Edward Sebesta
Sent: Wednesday, January 02, 2008 12:30 PM
To: General MEMS discussion
Subject: [mems-talk] Need recommendation on good book on bonding.

I wish to purchase a good book on wafer bonding. This book should cover
all the types of wafer bonding and survey all the issues involved. The
book should be one volume. 
 
I would appreciate any recommendations and in particular why they
recommend a specific book.