[mems-talk] UV-tape removing

[KyungHeon Lee]

Happy New Year to all


I used UV-tape as barrier during DRIE process. 

But I could not remove it easily even though I did piranha cleaning 10min and
soak in acetone over 5hr.(did acetone first^^)

I assume adhesion properties of UV-tape get changed during DRIE process so,
it is difficult to remove UV tape completely.

So I can remove UV-tape completely?

 

Best regards, 

Ero