[mems-talk] Etching silicon nitride

[Sandip Agarwal]

I want to pattern silicon nitride by etching with hot phosphoric acid.
What are the photoresists that would withstand these etching conditions?


Sandip Agarwal

Senior Scientist
Nano-Terra Inc.
790 Memorial Drive, Suite 202
Cambridge MA 02139
0 617 621 8500 x2302   C 713 471 0916   F 617 621 8501
sagarwal at nanoterra.com <mailto:sagarwal at nanoterra.com>
www.nanoterra.com <http://www.nanoterra.com>