[mems-talk] Etching silicon nitride

[Bob Henderson]

I don't believe there are any photoresists that can withstand hot phosphoric
acid like you describe. Plasma etch works just fine. Bob Henderson

----- Original Message ----- 
From: "Sandip Agarwal" <sagarwal at nanoterra.com>
To: <mems-talk at memsnet.org>
Sent: Tuesday, January 08, 2008 8:48 AM
Subject: [mems-talk] Etching silicon nitride

> I want to pattern silicon nitride by etching with hot phosphoric acid.
> What are the photoresists that would withstand these etching conditions?