[mems-talk] conductivity of SiO2 layer grown on top of heavily

Seongmu Heo smheo at adles.co.kr
Wed Jan 9 00:02:09 EST 2008


Hi Wenlin,

Whichever you take wet or dry oxidation,
the SiO2 layer will not be electrically conductive.
and the insulating quality depends on the oxide quality and the layer thickness.

Best Regards,
SM


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