[mems-talk] Dry etching of polyimide with PR mask

Zotl Ernst ernst.zotl at epluse.at
Thu Jan 10 07:39:40 EST 2008

Previous message: [mems-talk] TaN and IrO2 etching
Next message: [mems-talk] SIMOX wafer characterization
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Thanks for the input!
Yes, the pads are floating, they are deposited on glass substrates.

Previous message: [mems-talk] TaN and IrO2 etching
Next message: [mems-talk] SIMOX wafer characterization
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the MEMS-talk mailing list