[mems-talk] SIMOX wafer characterization

[Andrea Mazzolari]

Hi all, i need to to characterize surface quality of simox wafers.
I don't need a local information, but a global information over an area of
10x10mm. I need to be sure that device layer is of good crystalline
quality.

How can i do this ? I have thought to high resolution TEM, but it is a
local analysis, so it is not good for me. Any suggestion ?

Many thanks,
Andrea