[mems-talk] How to deposite Pt electrods on PMMA substrate

meifang at mech.uwa.edu.au meifang at mech.uwa.edu.au
Sun Jan 13 22:19:24 EST 2008


Hi all,

I need to deposite some Pt electrods on PMMA substrate. For PMMA can  
not survive high temprature and dissolve in acetone, normal lift-off  
is not suitable. Could anyone give some suggestion on the deposition  
and lift-off procedure? Thanks a lot.

Meifang



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