[mems-talk] How to deposite Pt electrods on PMMA substrate

Mon Jan 14 20:57:41 EST 2008

Meifang

If you can bear the roughness you could use hard mask instead of lift-off.For depositing Pt on PMMA substrate and for good adherence, you should do some experiment ,as lower the temperature.

Good luck!

Sen 

--附转发的邮件--From: meifang at mech.uwa.edu.auTo: mems-talk at memsnet.orgDate: Mon, 14 Jan 2008 12:19:24 +0900Subject: [mems-talk] How to deposite Pt electrods on PMMA substrateHi all, I need to deposite some Pt electrods on PMMA substrate. For PMMA can  not survive high temprature and dissolve in acetone, normal lift-off  is not suitable. Could anyone give some suggestion on the deposition  and lift-off procedure? 