[mems-talk] Re: RIE removal of S1818 photoresist (Curtis, Mark E.)

Indusekhar indusekhar at sitarindia.com
Thu Jan 17 23:37:34 EST 2008


Hello Mark

Maybe you should attempt to clean the mask with Hot sulphuric acid
followed by  Di water and IPA to remove the balance photoresit residues.

Indusekhar


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