[mems-talk] High Thickness of Aluminum on Silicon

[Jacques FATTACCIOLI]

Hi All !

For my process, I would like to know if there is an "easy" way to get  
a thick (300microns > t > 30 microns) layer of bare aluminum on a  
silicon wafer ?
Evaporation and Sputtering are not suitable for this...

Thank you very much for you help

Jacques FATTACCIOLI
IIS - University of Tokyo
jacques at iis.u-tokyo.ac.jp