[mems-talk] High Thickness of Aluminum on Silicon

[shay kaplan]

You can try high temp bonding of aluminum foil
Shay

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Jacques FATTACCIOLI
Sent: Monday, January 21, 2008 3:30 AM
To: General MEMS discussion
Subject: [mems-talk] High Thickness of Aluminum on Silicon

Hi All !

For my process, I would like to know if there is an "easy" way to get  
a thick (300microns > t > 30 microns) layer of bare aluminum on a  
silicon wafer ?
Evaporation and Sputtering are not suitable for this...