[mems-talk] TaN and IrO2 etching

[Kvel Bergtatt]

i recall SC-1 being able to etch both TaN & TiN, which was an undesired lack
of selectivity.

On Jan 10, 2008 1:44 AM, <schahrazede.mouaziz at epfl.ch> wrote:

> Hello,
>
> Does anyone know how to etch (wet or dry) TaN and IrO2?