[mems-talk] High Thickness of Aluminum on Silicon

Jacques FATTACCIOLI jacques at iis.u-tokyo.ac.jp
Tue Jan 22 00:49:15 EST 2008


Thank you very much !!

About electroplating, aluminum is not easy to deposit by that way :  
harsh anhydrous conditions with dangerous processes.

I didn't know about screen printing of metals for MEMS processes !  
Thank you for the advice.

Maybe the easiest will be to try eutectic bonding.

Jacques

On Jan 22, 2008, at 4:22 AM, Hong Chen wrote:

> Electroplating
>
> -----Original Message-----
> From: mems-talk-bounces at memsnet.org [mailto:mems-talk- 
> bounces at memsnet.org]
> On Behalf Of Andrea Mazzolari
> Sent: Monday, January 21, 2008 11:50 AM
> To: General MEMS discussion
> Subject: Re: [mems-talk] High Thickness of Aluminum on Silicon
>
> Yes, this is possible with screen printing. Maybe there are other  
> methods,
> i don't know.
> At physics department of Ferrara University we have the possibility to
> realize such depositions.


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