[mems-talk] RE: How to uniformly etch ~0.05 - 0.3um off a 3" Si wafer?

[li ling]

I used to try SF6 for in cryogenic temperature for etching down the silicon surface.The surface roughness is quite well but it is a little tricky to control the etching speed. 1.3um-2.5um/min.Maybe it is better for silicon with mask though.

  Good Luck
   
  Paynee