[mems-talk] High Thickness of Aluminum on Silicon

[David Nemeth]

Electroplating is a good solution, but care must be taken with very thick
layers to avoid excessive stress at these thicknesses.  

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Hong Chen
Sent: Monday, January 21, 2008 2:23 PM
To: mazzolari at fe.infn.it; 'General MEMS discussion'
Subject: RE: [mems-talk] High Thickness of Aluminum on Silicon

Electroplating 

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Andrea Mazzolari
Sent: Monday, January 21, 2008 11:50 AM
To: General MEMS discussion
Subject: Re: [mems-talk] High Thickness of Aluminum on Silicon

Yes, this is possible with screen printing. Maybe there are other methods,
i don't know.
At physics department of Ferrara University we have the possibility to
realize such depositions.