[mems-talk] Copper

Hakemi, Ghazal g.hakemi at Cranfield.ac.uk
Thu Jan 24 04:40:12 EST 2008


Dear all,
 
I have a chemistry-related question : does copper etch away in oxygen plasma?
 
Many thanks
 
Ghazal
 
 
Miss Ghazal Hakemi
PhD Student 
Microsystems and Nanotechnology Centre (Building 70)
Cranfield University
MK43 0AL
tel. 01234 750111 x2583


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