[mems-talk] Copper

[Bill Moffat]

Miss Ghazal,
            No it oxidizes rapidly and turns black.  It may be possible
to alternately oxidise with an Oxygen plasma then eat the oxide with a
Hydrogen containing gas or ammonia. 
Bill Moffat, CEO 
Yield Engineering Systems, Inc. 
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353 

www.yieldengineering.com

 

-----Original Message-----
From: mems-talk-bounces at memsnet.org
[mailto:mems-talk-bounces at memsnet.org] On Behalf Of Hakemi, Ghazal
Sent: Thursday, January 24, 2008 1:40 AM
To: mems-talk at memsnet.org
Subject: [mems-talk] Copper

Dear all,
 
I have a chemistry-related question : does copper etch away in oxygen
plasma?