[mems-talk] PECVD oxide on gold

[Ruiz, Marcos Daniel (SENCOE)]

Roughness an inherent property of PECVD film, however, it is worse when deposited over evaporated metal since the metal itself has some roughness.  The pinholes are also inherent in PECVD film, and the severity is increased by pinholes in the Au.

You may want to try a reduced deposition rate, lower pressure, lower gas flow, or reduced power to improve the step coverage of the PECVD.

Dan

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org] On Behalf Of Javier Sesé
Sent: Thursday, January 24, 2008 9:42 AM
To: General MEMS discussion
Subject: [mems-talk] PECVD oxide on gold


  We are fabricating a microcoil using two metal layers and PECVD oxide for electrical insulation. The metal layers are gold deposited using e-beam evaporation with a few nm of Cromium for adhesion. We found that the PECVD oxide that grows on top of gold is VERY ROUGH (tipically a roughness of 50nm for a 200nm thick layer). Further it is plenty of pinholes. Does anyone know the reason?

We use N2O and 5%SiH4 95%He as precursor gases, deposition temperature is T=300ºC
 


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