[mems-talk] How to remove AZ photoresist in SU-8 microchannel?

[K.P.Nichols at utwente.nl]

KOH will cause your SU-8 to peel off.

- Kevin Nichols

-----Original Message-----
From: mems-talk-bounces at memsnet.org on behalf of jpt sharma
Sent: Wed 1/30/2008 11:05 PM
To: General MEMS discussion
Subject: Re: [mems-talk] How to remove AZ photoresist in SU-8 microchannel?
 
Hi
 KOH solution can remove AZ 5214 but I am not sure what it does with SU-8.
Thanks