[mems-talk] TiSi2 etching

[Elina Iervolino - EWI]

Hello everybody,
I made a layer of TiSi2 on the top of  my SiN cantilever
For the etching of my cantilever I used KOH but the TiSi2 does not survive. It is like
a sheet that starts to remove from the SiN base

Does enyone experience with the TiSi2?
Which wet etchant should I use?

ir. Elina Iervolino - PhD student
Delft University of Technology
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        eli at xensor.nl