[mems-talk] how to dissolve silicic acid in TMAH

Tue Jul 1 11:59:52 EDT 2008

Hi all

i am trying to use TMAH+Silicic Acid+ Ammounium persulfate solution for protecting Al on Si. But i am not able to dissolve Silicic acid in 5% TMAH Solution. i have tried at 80 C nd 120 C for about one hour without any result. can anybody help me in this matter.

Mukesh Kumar
Advanced materials and Devices group
TASC-INFM
Basovizza, S.S. 14 Km 163.5
34012 Trieste  ITALY
email:- kumarm at tasc.infm.it
phone:-  +39  040  3756438