[mems-talk] PDMS to PDMS oxygen plasma bonding

Liang Zhao zhaoliang2003 at gmail.com
Fri Jul 4 05:44:33 EDT 2008


yes, it works

2008/7/2 Joshua Tice <joshtice at gmail.com>:

> Hi Jose,
>
> Yes, although in my experience, it doesn't always work as consistently.  I
> always heat my devices afterward to improve the seal (usually 65 C for an
> hour).
>
> When sealing PDMS to PDMS, you can also use different ratios of curing
> agent
> in each layer to create a seal.  See Quake et al.'s paper:
> http://www.sciencemag.org/cgi/content/full/288/5463/113
>
> Josh

-- 
赵亮
南京大学化学化工学院
Liang Zhao
School of Chemistry and Chemical Engineering, Nanjing University


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