[mems-talk] Black wax

[Anahí Weinstock]

Hi
I´m using black wax as wet etching protector. In bibliografy it is 
dissolved in toluene and cured at 100 ºC in oven for 1 hs, then after 
being deposited on the wafer. The problem is that this protective film 
only takes about an hours in KOH 40% at 60ºC.
Someone has experience what are the optimal conditions for working with 
this material?
Thanks
Anahí

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Lic. Anahi F. Weinstock

INSTITUTO NACIONAL DE TECNOLOGÍA INDUSTRIAL
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