[mems-talk] KOH etching of doped (P,As) Si wafers

[P.E.M. Kuijpers]

Hi All,

Is the etch behaviour (in 33% KOH) of highly doped Si wafers the same as
un-doped Si wafers.


Thanks in advance.
Peter Kuijpers
MiPlaza
mailto:p.e.m.kuijpers at philips.com