[mems-talk] Black wax

[汪飞]

What do you mean about "that this protective film only takes about an
hours in KOH 40% at 60ºC"?

2008/7/4, Anahí Weinstock <wanahi at inti.gov.ar>:
> Hi
> I´m using black wax as wet etching protector. In bibliografy it is
> dissolved in toluene and cured at 100 ºC in oven for 1 hs, then after
> being deposited on the wafer. The problem is that this protective film
> only takes about an hours in KOH 40% at 60ºC.
> Someone has experience what are the optimal conditions for working with
> this material?
> Thanks
> Anahí
-- 
Best regards,
Yours sincerely
Fei Wang
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State Key Lab of Transducer Technology,
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