[mems-talk] Ebeam evaporation of Silicon Nitride

[Gord Wang]

The standard process for silicon nitride is PECVD. You'd definitely also
use reactive sputtering. I do not think E-beam will work well.

Gord Wang
Nanowave

-----Original Message-----
From: Dave [mailto:dmc642 at gmail.com] 
Sent: July 16, 2008 12:10 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] Ebeam evaporation of Silicon Nitride

Hello,

I am looking to deposit an insulating, optically clear, layer for some
circuitry, and was wondering if I could Ebeam evaporate Silicon nitride?
Also, if I can, I saw something about alpha and beta forms, is there any
substantial difference when dealing with the insulating properties?

Thanks,
David Casale
Drexel University