[mems-talk] Ebeam evaporation of Silicon Nitride (MEMS-talk Digest, Vol 69, Issue 14)

[Jordan Berg]

Dear David,

We had mediocre results with e-beam deposition of silicon dioxide (from
quartz). Most significantly for your application, the films had lots of
pinholes, and were unsuitable as insulating layers. We eventually gave up.

We never tried silicon nitride, but I would think it would be much harder,
especially if you do it using a silicon source and nitrogen gas. We now use
PECVD for our nitride and oxide layers.

Best,
Jordan

> Hello,
> 
> I am looking to deposit an insulating, optically clear, layer for some
> circuitry, and was wondering if I could Ebeam evaporate Silicon nitride?
> Also, if I can, I saw something about alpha and beta forms, is there any
> substantial difference when dealing with the insulating properties?
> 
> Thanks,
> David Casale
> Drexel University