[mems-talk] AZ 4620 resist coating

maninder kaur maninder8423 at gmail.com
Fri Jul 18 02:41:48 EDT 2008

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Hi

I am working towards the fabrication of RF switch. Can any one tell me the
receipe of coating AZ 4620 from 3 to 9 microns.

Maninder

Previous message: [mems-talk] Ebeam evaporation of Silicon Nitride (MEMS-talk Digest, Vol 69, Issue 14)
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