[mems-talk] Effect of EDP/KOH on PDMS and photopatternable silicone

[shay kaplan]

KOH doesn't affect PDMS
Shay
-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Anurag Tripathi
Sent: Thursday, July 17, 2008 7:06 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] Effect of EDP/KOH on PDMS and photopatternable silicone

Hello,

I wanted to know if anyone of you has an experience with performing  
EDP/KOH etch of a Si wafer with PDMS or photopatternable silicone WL  
5150 patterned on the back side. Does the EDP/KOH etch damage the PDMS  
or the photopatternable silicone?

Thank you very much,

Anurag Tripathi